Current Photovoltaic Research ISSN:2288-3274(Print) 2508-125X(Online)

Combined nano‐ and micro‐wires (CNMWs) Si arrays were prepared using PR patterning and silver‐assisted electroless etching. A POCl3 doping process was applied to the fabrication of CNMWs solar cells. KOH solution was used to remove bundles in CNMWs and the etching time was varied from 30 to 240 s. The lowest reflectance of 3.83% was obtained at KOH etching time of 30 s, but the highest carrier lifetime of 354 μs was observed after the doping process at 60 s. At the same etching time, a V_oc of 574 mV, J_sc of 28.41 mA/cm², FF of 74.4%, and Eff. of 12.2% were achieved in the CNMWs solar cell. CNMWs solar cells have potential for higher efficiency by improving the postprocess and surface‐rear side structure.