High-functional Transparent Electrode Design and Shielding Effect

Seongwon Cho; Wu-shin Cha; Junheon Ha; Junsik Lee; Jiwon Kang; Thanh Tai Nguyen; Joondong Kim

doi:10.21218/CPR.2023.11.1.013

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High-functional Transparent Electrode Design and Shielding Effect 금속산화물 기반의 고성능 투명 전극 및 전자파 차단 효과

31 March 2023. pp. 13-17

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Abstract

Functional transparent electrode was achieved by metal oxide-metal-Metal oxide (OMO) structure. Tailoring of metal oxide and metal layers, optically transparent and electrically excellent OMO films were investigated. Silver (Ag) is adopted for the metal layer and Ag oxide (AgO) is reactively formed by flowing O₂ gas during the sputtering process. This spontaneous AgO formation from Ag simultaneously provides the good electrical interface with high transparency. Due to the feature of transparent electrode of OMO, it endows the shielding effect (SE) function of electromagnetic interference. Optically transparent and electrically conductive OMO electrode shows the high transmittance (83.7%) and low sheet resistance (6.5 Ω/□) with SE of 29.54 dB.

Keywords

AgO

EMI Shielding

Ag growth

Reactive sputtering

AgO/Ag/AZO film

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Information

Publisher :Korea Photovoltaic Society
Publisher(Ko) :한국태양광발전학회
Journal Title :Current Photovoltaic Research
Volume : 11
No :1
Pages :13-17
Received Date : 2023-02-12
Revised Date : 2023-03-13
Accepted Date : 2023-03-13
DOI :https://doi.org/10.21218/CPR.2023.11.1.013

Current Photovoltaic Research ISSN:2288-3274(Print) 2508-125X(Online)

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