Characterisitics of RF/DC Sputter Grown-ITO/Ag/ITO Thin Films for Transparent Conducting Electrode

Lee,  Youngjae and Kim,  Jeha

doi:10.21218/CPR.2022.10.1.028

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2022 Vol.10, Issue 1 Preview Page

Characterisitics of RF/DC Sputter Grown-ITO/Ag/ITO Thin Films for Transparent Conducting Electrode RF/DC 스퍼터 성장한 ITO/Ag/ITO 투명전극 박막의 특성 연구

31 March 2022. pp. 28-32

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Abstract

We investigated the optical and electrical characteristics of ITO/Ag/ITO (IAI) 3-layer thin films prepared by using RF/DC sputtering. To measure the thickness of all thin film samples, we used scanning electron microscopy. As a function of Ag thickness we characterized the optical transmittance and sheet resistance of the IAI samples by using UV-Visible spectroscopy and Hall measurement system, respectively. While the thickness of both ITO thin films in the 3-layered IAI samples were fixed at 50 nm, we varied Ag layer thickness in the range of 0 nm to 11 nm. The optical transmittance and sheet resistance of the 3-layered IAI thin films were found to vary strongly with the thickness of Ag film in the ITO (50 nm)/Ag(t₀)/ITO (50 nm) thin film. For the best transparent conducting oxide (TCO) electrode, we obtained a 3-layered ITO (50 nm)/Ag (t₀ = 8.5 nm)/ITO (50 nm) that showed an avrage optical transmittance, AVT = 90.12% in the visible light region of 380 nm to 780 nm and the sheet resistance, R_□＝7.24 Ω/□.

Keywords

Transparent conducting oxide electrode

sputtering

ITO/Ag/ITO

Thin films

optical transmittance

sheet resistance

References

Lee, G.H, Lee, S.H, Yun, J.H, Kim, D.H, "ITO 투명 전극 소재 기술 동향," Information Display, 11(5), 17 -22 (2010).

J.U. Seok, "투명전도성 산화물반도체 소재 기술 동향," Ceramist, 20(4), 23-29 (2017).

W.S. Liu, W.T. Hsieh, S.Y. Chen, C.S. Huang, "Improvement of CIGS solar cells with high performance transparent conducting Ti-doped GaZnO thin films," Solar Energy, 174, 83-96 (2018). 10.1016/j.solener.2018.08.050

Q. Wei, Z. Yang, D. Yang, W. Zi, X. Ren, Y. Liu, X. Liu, J. Feng, S. Liu, "The effect of transparent conductive oxide on the performance CH3NH3PbI3 perovskite solar cell without electron/hole selective layers," Solar Energy, 135, 654-661 (2016). 10.1016/j.solener.2016.06.044

N. Biswas, P. Ghosh, S. Sarkar, D. Moitra, P.K. Biswas, S. Jana, A.K. Mukhopadhyay, "Nanomechanical properties of dip coated indium tin oxide films on glass," Thin Solid Films, 579, 21-29 (2015). 10.1016/j.tsf.2015.02.030

C. Yang, S. Lee, T. Lin, S. Chen, "Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering," Thin Solid Films, 516, 1984-1991 (2008). 10.1016/j.tsf.2007.05.093

Jeffrey M. Gaskell, David W. Sheel, "Deposition of indium tin oxide by atmospheric pressure chemical vapour deposition," Thin Solid Films, 520, 4110- 4113 (2012). 10.1016/j.tsf.2011.04.191

C. Guillén, J. Herrero, "TCO/metal/TCO structures for energy and flexible electronics," Thin Solid Films. 520. 1-17 (2011). 10.1016/j.tsf.2011.06.091

M. Bender, W. Seelig, C. Daube, H. Frankenberger, B. Ocker, J. Stollenwerk, "Dependence of film composition and thicknesses on optical and electrical properties of ITO-metal-ITO multilayers," Thin Solid Films, 326, 67-71 (1998). 10.1016/S0040-6090(98)00520-3

H.B. Kim, D.H. Kim, G.H. Lee, K.H. Kim, "Electrical and Optical Properties of Transparent Conducting Films having GZO/Metal/GZO Hybrid-structure; Effects of Metal Laye r(Ag, Cu, Al, Zn)," Korean Institute of Surface Engineering, 43. 148-153 (2010). 10.5695/JKISE.2010.43.3.148

E. Z. Luo, S. Heun, M. Kennedy, J. Wollschläger, M. Henzler, "Surface roughness and conductivity of thin Ag films," Phys. Rev. B, 49, 4858 (1994). 10.1103/PhysRevB.49.485810011417

Jung Y.H., Lee E.S., Munir B., Wibowo R.A., Kim K.H., "Structure and Properties of Sputtered Indium Tin Oxide Thin Film," 38, 150-155 (2005).

Information

Publisher :Korea Photovoltaic Society
Publisher(Ko) :한국태양광발전학회
Journal Title :Current Photovoltaic Research
Volume : 10
No :1
Pages :28-32
Received Date :2022. 02. 11
Revised Date :2022. 03. 07
Accepted Date : 2022. 03. 08
DOI :https://doi.org/10.21218/CPR.2022.10.1.028

Current Photovoltaic Research ISSN:2288-3274(Print) 2508-125X(Online)

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