Current Photovoltaic Research ISSN:2288-3274(Print) 2508-125X(Online)

We fabricated two different transparent conducting oxide thin films of ZnO doped with Ga (Ga₂O₃ 0.9 wt%) as well as Al (Al₂O₃ 2.1 wt%) (GAZO) and ZnO doped only with Al (Al₂O₃ 3 wt%) (AZO). It was investigated how it affects the moisture resistance of the transparent electrode. In addition, Cu(In,Ga)Se₂ thin film solar cells with two transparent oxides as front electrodes were fabricated, and the correlation between humidity resistance of transparent electrodes and device performance of solar cells was examined. When both transparent electrodes were exposed to high temperature distilled water, they showed a rapid increase in sheet resistance and a decrease in the fill factor of the solar cell. However, AZO showed a drastic decrease in efficiency at the beginning of exposure, while GAZO showed that the deterioration of efficiency occurred over a long period of time and that the long term moisture resistance of GAZO was better.