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2024 Vol.12, Issue 2
Study on Auger Recombination Control using Barrier SiO2 in High-Quality Polysilicon/Tunneling oxide based Emitter Formation

고품질 polysilicon/tunneling oxide 기반의 에미터 형성 공정에서의 Auger 재결합 조절 연구

Huiyeon Lee1
,
SuBeom Hong2
,
Donghwan Kim1*
이 희연1
,
홍 수범2
,
김 동환1*
1Department of Materials Science and Engineering, Korea University, Seoul, 02841, Korea
2Green School Graduate School of Energy and Environment (KU-KIST), Korea University, Seoul, 02841, Korea
1신소재공학과, 고려대학교, 서울특별시, 02841
2에너지지스템공학과, 고려대학교, 서울특별시, 02841
*Corresponding Author
30 June 2024. pp. 31-36
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Abstract

Passivating contacts are a promising technology for achieving high efficiency Si solar cells by reducing direct metal/Si contact. Among them, a polysilicon (poly-Si) based passivating contact solar cells achieve high passivation quality through a tunnel oxide (SiOx) and poly-Si. In poly-Si/SiOx based solar cells, the passivation quality depends on the amount of dopant in-diffused into the bulk-Si. Therefore, our study fabricated cells by inserting silicon oxide (SiO2) as a doping barrier before doping and analyzed the barrier effect of SiO2. In the experiments, p+ poly-Si was formed using spin on dopant (SOD) method, and samples ware fabricated by controlling formation conditions such as existence of doping barrier and poly-Si thickness. Completed samples were measured using quasi steady state photoconductance (QSSPC). Based on these results, it was confirmed that possibility of achieving high Voc by inserting a doping barrier even with thin poly-Si. In conclusion, an improvement in implied Voc of up to approximately 20 mV was achieved compared to results with thicker poly-Si results.

Keywords
Passivating contact
Double side TOPCon
Boron doping
Doping barrier
SiO2
Auger recombination
Parasitic absorption
Spin-on dopant (SOD)
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Information
  • Publisher :Korea Photovoltaic Society
  • Publisher(Ko) :한국태양광발전학회
  • Journal Title :Current Photovoltaic Research
  • Volume : 12
  • No :2
  • Pages :31-36
  • Received Date : 2024-03-12
  • Revised Date : 2024-06-18
  • Accepted Date : 2024-06-18
  • DOI :https://doi.org/10.21218/CPR.2024.12.2.031
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